Issue Date | Title | Author(s) | Relation | scopus | WOS | Fulltext/Archive link |
---|---|---|---|---|---|---|
1999 | Deposition of silicon carbon nitride films by ion beam sputtering | Wu, J. J.; Wu, C. T.; Liao, Y. C.; Lu, T. R.; Chen, L. C.; Chen, K. H.; Hwa, L. G.; Kuo, C. T.; Ling, K. J. | THIN SOLID FILMS 355, 417-422 |