Issue Date | Title | Author(s) | Relation | scopus | WOS | Fulltext/Archive link |
---|---|---|---|---|---|---|
1997 | Global Model for High Pressure Electronegative Radio-frequency Discharges | Y. T. Lee; M. A. Leiberman; A. J. Lichtenberg; F. Bose; H. Baltes; R. Patrick | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 15(1), 113-126 |