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Browsing by Author w. c. chen


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2012Effect of substrate bias on the promotion of nanocrystalline silicon growth from He-diluted SiH4 plasma at low temperatureD. Das; D. Raha; W. C. Chen; K. H. Chen; C. T. Wu; L. C. ChenJOURNAL OF MATERIALS RESEARCH 27, 1303
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