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Please use this identifier to cite or link to this item: http://ir.sinica.edu.tw/handle/201000000A/34745
Title: Enabling Low Power BEOL Compatible monolithic 3D+ nanoelectronics for IoTs Using Local and Selective Far-Infrared Ray Laser Anneal Technology
Authors: Chih-Chao Yang
Jia-Min Shieh
Tung-Ying Hsieh
Wen-Hsien Huang
Hsing-Hsiang Wang
Chang-Hong Shen
Tsung-Ta Wu
Yun-Fang Hou
Yi-Ju Chen
Yao-Jen Lee
Min-Cheng Chen
Fu-Liang Yang
Yu-Hsiu Chen
Meng-Chyi Wu
Wen-Kuan Yeh
Issue Date: 2015-12-07
Conference: International Electron Devices Meeting (IEDM) (Washington, DC, USA : IEEE)
URI: http://ir.sinica.edu.tw/handle/201000000A/34745
Appears in Collections:應用科學研究中心

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