Doping and electrical properties of amorphous silicon carbon nitride films.

Please use this identifier to cite or link to this item: http://ir.sinica.edu.tw/handle/201000000A/43850

Title:	Doping and electrical properties of amorphous silicon carbon nitride films.
Authors:	Chou, Y. C. Chattopadhyay, S. Chen, L. C. Chen, Y. F. Chen, K. H.
Issue Date:	2003
Relation:	DIAMOND AND RELATED MATERIALS 12,1213-1219
URI:	http://ir.sinica.edu.tw/handle/201000000A/43850
ISSN:	http://gateway.isiknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=Drexel&SrcApp=hagerty_opac&KeyRecord=0925-9635&DestApp=JCR&RQ=IF_CAT_BOXPLOT
Appears in Collections:	原子與分子科學研究所

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