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  1. Scholars Hub of the Academia Sinica
  2. 數理科學組
  3. 物理研究所
Please use this identifier to cite or link to this item: http://ir.sinica.edu.tw/handle/201000000A/45655
Title: High-Speed and Large-Range Scanner Integrated with Astigmatic Detection System for Atomic Force Microscope
Authors: Ren-Feng Ding
Hsuan-Fu Huang
Biing-Chwen Chang
Hsien-Shun Liao
Chih- Wen Yang
En-Te Hwu
Kuang-Yuh Huang
Chia-Seng Chang
Ing-Shouh Hwang
Issue Date: 2014-08-04
Conference: The 17th International Conference on non-contact Atomic Force Microscopy (Tsukuba, Japan : National Institute for Materials Science)
URI: http://ir.sinica.edu.tw/handle/201000000A/45655
Appears in Collections:物理研究所

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