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Please use this identifier to cite or link to this item: http://ir.sinica.edu.tw/handle/201000000A/73915
Title: Atomic-layer etching of transition metal dichalcogenides and equivalent selective etching of their hetero-structures
Authors: Kuan-Chao Chen
Chia-Wei Liu
Si-Chen Lee
Shih-Yen Lin
Issue Date: 2018-09-10
Conference: Graphene Week 2018 (San Sebastian, Spain : Graphene Flagship)
URI: http://ir.sinica.edu.tw/handle/201000000A/73915
Appears in Collections:應用科學研究中心

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