Dopant Diffusion and Activation in Silicon Nanowires Fabricated by ex situ Doping: A Correlative Study via Atom-Probe Tomography and Scanning Tunneling Spectroscopy

請用此 Handle URI 來引用此文件： http://ir.sinica.edu.tw/handle/201000000A/49549

題名:	Dopant Diffusion and Activation in Silicon Nanowires Fabricated by ex situ Doping: A Correlative Study via Atom-Probe Tomography and Scanning Tunneling Spectroscopy
作者:	Sun, Zhiyuan Hazut, Ori Huang, Bo-Chao Chiu, Ya-Ping Chang, Chia-Seng Yerushalmi, Roie Lauhon, Lincoln Seidman, David
公開日期:	2016-06
關聯:	NANO LETTERS 16 (7), 4490–4500
URI:	http://ir.sinica.edu.tw/handle/201000000A/49549
ISSN:	http://gateway.isiknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=Drexel&SrcApp=hagerty_opac&KeyRecord=1530-6984&DestApp=JCR&RQ=IF_CAT_BOXPLOT
顯示於：	物理研究所

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