Surface micromachining on a polymethylmethacrylate substrate using visible laser-induced backside wet etching with a KMnO4 solution as an absorber

請用此 Handle URI 來引用此文件： http://ir.sinica.edu.tw/handle/201000000A/81557

題名:	Surface micromachining on a polymethylmethacrylate substrate using visible laser-induced backside wet etching with a KMnO4 solution as an absorber
作者:	Chang, Hui-Fang Yeung, Wing Kiu Kao, Wei-Chen Ehrhardt, Martin Zimmer, Klaus Cheng, Ji-Yen
公開日期:	2020-03
關聯:	Journal of Laser Applications 32(2), 022014
URI:	http://ir.sinica.edu.tw/handle/201000000A/81557
ISSN:	http://gateway.isiknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=Drexel&SrcApp=hagerty_opac&KeyRecord=1042-346X&DestApp=JCR&RQ=IF_CAT_BOXPLOT
URL:	http://dx.doi.org/10.2351/1.5114659
顯示於：	應用科學研究中心

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